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  • 集成电路无尘车间的建设特点
    来源:http://www.jnyhrs.com 浏览: 发布日期:2022-01-11
    1. 把关键的洁净(加工)区尽量减少并与洁净走道、洁净维护及修理区等相隔,避免或减少人员、工艺及工艺设备散发的粒子的污染及交叉污染,以利用达到严格的控制洁净度要求并减少电耗及费用。
    1. The key clean (processing) area shall be minimized and separated from the clean walkway, clean maintenance and repair area, so as to avoid or reduce the particle pollution and cross pollution emitted by personnel, process and process equipment, so as to achieve strict cleanliness control requirements and reduce power consumption and cost.
    2. 工艺与工艺设备的开发已需密切与洁净技术相结合,如减少工艺本身及工艺设备散发的粒子,采用机器人传送片盒或SMIF系统等传送片盒避免人与硅片的直接接触等。
    2. The development of process and process equipment needs to be closely combined with clean technology, such as reducing the particles emitted by the process itself and process equipment, using robot to transfer the cassette or SMIF system to avoid direct contact between people and silicon wafer, etc.
    3. 基于以上二点,集成电路亚微米加工,现有典型的无尘车间形式基本由二类:
    3. Based on the above two points, the existing typical dust-free workshop for integrated circuit submicron processing basically consists of two types:
    ① 隧道式无尘车间。无尘车间分隔成洁净加工隧道(区),洁净走道及洁净维护修理隧道(区)。加工区的洁净度要求更严,其他区及走道洁净度要求可低一些。目前国内已有可作集成电路亚微米加工的无尘车间都是这种形式。
    无菌室装修
    ① Tunnel type dust-free workshop. The dust-free workshop is divided into clean processing tunnel (area), clean walkway and clean maintenance and repair tunnel (area). The cleanliness requirements of the processing area are the most stringent, and the cleanliness requirements of other areas and walkways can be lower. At present, there are dust-free workshops that can be used for sub micron processing of integrated circuits in China.
    ② “微环境”系统无尘车间,这种无尘车间内片盒的传送采用SMIF系统(或类似的系统),它包括:存放片盒的洁净容器(SMIF POD);能自动接受洁净容器(SMIF POD)并打开容器把片盒送入(送出)设备的加工部位的机械手装置(SMIFARM).
    ② "Microenvironment" system is a dust-free workshop. The transfer of film boxes in this dust-free workshop adopts SMIF system (or similar system), which includes: clean container for storing film boxes (SMIF POD); A manipulator device (smiarm) that can automatically accept the clean container (SMIF POD) and open the container to send the cassette to (send out) the processing part of the equipment
    把SMIF ARM及加工部位以适用的材料封闭起来与无尘车间环境隔离,在这较小的空间送入严格要求的洁净空气,而无尘车间的洁净度可为100~1000级(FS-209D),即≥0.5μm的粒子不多于100~1000个/ft3。
    The SMIF arm and processing parts are sealed with applicable materials and isolated from the environment of the dust-free workshop. Strictly required clean air is sent into this small space, and the cleanliness of the dust-free workshop can be 100 ~ 1000 (fs-209d), i.e. ≥ 0.5 μ The particles of m shall not be more than 100 ~ 1000 / FT3.
    由于硅片避免或减少了受操作人员、工艺设备及工艺加工散发的粒子的直接污染或交叉污染,而“微环境”加工区空间又很小,从而能较有效的控制硅片受粒子的污染,并降低无尘车间造价及运行费用,操作人员亦可在不十分严格的洁净环境内工作。
    Because the silicon wafer avoids or reduces the direct pollution or cross pollution by the particles emitted by the operators, process equipment and process processing, and the space of the "microenvironment" processing area is very small, it can effectively control the pollution of the silicon wafer by the particles, reduce the cost and operation cost of the dust-free workshop, and the operators can also work in a less strict clean environment.
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    Thank you for reading. Source of this article: sterile room decoration. For more contents and questions, please click: http://www.jnyhrs.com We will continue to work hard to provide you with services. Thank you for your support!